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UL3000 Fab ULTRA (***NEW***)

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ULTRATEST sensor technology

詳細(xì)信息 在線詢價(jià)

好處

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Most efficient leak checking using I·ZERO 2.0 with improved inligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

典型應(yīng)用

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

規(guī)格

類型 UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
Min. detectable leak rate for helium (vacuum method) mbar?L/s < 5 x 10-12
Min. detectable leak rate for helium (sniffer mode) mbar?L/s < 5 x 10-8
Max. Inlet pressure (MASSIVE mode) mbar 1000
Pumping speed during evacuation m³/h >32                          >36
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Response time s <>
Time until ready for operation min <>
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H2, 3He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interfaces 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987
Weight kg 118                           132
Permissable ambient temperature range (during operation) °C 10 to 40
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

零件號(hào)

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
零件號(hào) 明細(xì)
550-260 UL3000 Fab ULTRA
550-200 UL3000 Fab

附件

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
零件號(hào) 明細(xì)
551-015 遙控器 RC1000WL,無線,包括無線發(fā)射機(jī)
551-010 遙控器 RC1000C,有線,帶 4 米卷線
551-202 Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
525-001 3米吸槍
525-002 5米吸槍
525-003 SL3000-10, sniffer line 10 m length
551-203 Bracket for SL3000
551-210 SL200, Sniffer line + el. extension for UL3000
551-201 Helium Bottle Holder
560-310 I/O 1000 模塊
560-315 BM1000 Profibus 模塊
560-316 BM1000 PROFINET IO 模塊
560-317 BM1000 DeviceNet module
560-318 BM1000 Ethernet/IP module
560-334 Data cable 0,5m I/O1000, BM10000
560-332 數(shù)據(jù)電纜(2 米)
560-335 數(shù)據(jù)電纜(5 米)
560-340 數(shù)據(jù)電纜(10 米)
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-205 extension cable for TC1000/SL200, UL3000

耗材

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
零件號(hào) 明細(xì)
200007656 Airfilter Kit UL3 Housing Ventilation

備件

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
零件號(hào) 明細(xì)
200000683 Replacement filter (2 pcs) for flood and
200000913 Exhaust filter UL1000
200001095 Spare part, flood filter
200001680 過濾套件10PCS P3000/XL適配器/T-Guard
200003801 Oil wick cartridge HiPace 50/80
200007617 Inlet flange UL3
200007624 Vacuum Hose DN25 UL3
200007631 TriScroll TS620 + Inverter UL3
200007653 Fan 4414N 24 V DC UL3
200007655 Fan 8314H 24 V DC UL3

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